Modeling and Control of Deformable Membrane Mirrors
نویسنده
چکیده
The use of deformable mirrors (DMs) in adaptive optics (AO) systems allows for compensation of various external and internal optical disturbances during image aquisition. For example, an astronomical telescope equipped with a fast deformable secondary mirror can compensate for atmospheric disturbances and wind shake of the telescope structure resulting in higher image resolution [1–4]. In microscopy, deformable mirrors allow to correct for aberrations caused by local variations of the refractive index of observed specimen. Especially confocal and multi-photon microscopes particularly benefit from the improved resolution for visualization of cellular structures and subcellular processes [5, 6]. In addition, results of applied adaptive optics for detection of eye diseases and in vitro retinal imaging on the cellular level show promising examination and treatment opportunities [7–9].
منابع مشابه
Methods for the characterization of deformable membrane mirrors.
We demonstrate two methods for the characterization of deformable membrane mirrors and the training of adaptive optics systems that employ these mirrors. Neither method employs a wave-front sensor. In one case, aberrations produced by a wave-front generator are corrected by the deformable mirror by use of a rapidly converging iterative algorithm based on orthogonal deformation modes of the mirr...
متن کاملMEMS Deformable Mirrors for Astronomical Adaptive Optics
We report on the development of high actuator count, micro-electromechanical (MEMS) deformable mirrors designed for high order wavefront correction in ground and space-based astronomical adaptive optics instruments. The design of these polysilicon, surface-micromachined MEMS deformable mirrors builds on technology that has been used extensively to correct for ocular aberrations in retinal imagi...
متن کاملMicromachined Deformable Mirrors for Dynamic Wavefront Control
The design, manufacture, and testing of optical quality surface micromachined deformable mirrors (DMs) is described. With such mirrors, the shape of the reflective surface can be modified dynamically to compensate for optical aberrations and thereby improve image resolution in telescopes or microscopes. Over several years, we have developed microelectromechanical system (MEMS) processing techno...
متن کاملDesign , fabrication , and open - loop control of micro deformable mirrors for astronomical telescopes
The research product ...............................................................................................................................1 Deformable mirrors: current state-of-the-art...........................................................................................2 AO and MEMS DMs: relevance to astronomy and space science......................................................
متن کاملMicroelectromechanical Deformable Mirrors - Selected Topics in Quantum Electronics, IEEE Journal on
A new class of silicon-based deformable mirrors is described. These devices are capable of correcting time-varying aberrations in imaging or beam forming applications. Each mirror is composed of a flexible silicon membrane supported by an underlying array of electrostatic parallel plate actuators. All structural and electronic elements were fabricated through conventional surface micromachining...
متن کامل